
全自动刀轮切割设备
应用领域:适用于硅、陶瓷、玻璃、砷化镓、磷化铟、各类引线框架/基板类封装体的切割等材料的切割,全系列兼容6-12寸晶圆。
示例机型:
HDL-8500/8510
应用领域Application:
适用于硅、陶瓷、玻璃、砷化镓、磷化铟、各类引线框架/基板类封装体的切割等材料的切割,全系列兼容6-12寸晶圆。
Blade saw applied for silicon, ceramic, gallium arsenide, and various materials like lead-frame and substrate, compatible with 6-12 inch wafer.
主要特点Main Features:
●外观尺寸追求小型化,占地面积小,切割行程大;
Miniaturized size and occupied area, but with huge working range;
●配备NCS、BBD、漏液检测模块、远程控制模块,智能化、高效化适应客户需求;
Equipped with NCS (Non-Contact Setup) block, BBD (blade break detect) block and weeping detecting block, adapt to customer's requirements intelligently and efficiently;
●大功率主轴,高速高精度电机,大幅提高生产效率;
High power spindle, high speed & high precision motor, highly increase the yield;
●高效的自动对准,自动刀痕识别以及崩边检测功能;
Efficient auto-focus, auto cutting line recognition and chipping detection function;
●多种切割模式任意选择,配有数据管理和日志管理系统,随时监控生产状况;
Switch to various cutting mode arbitrarily, with data management and log management system, easy to monitor the manufacture process at any time;
●配备17英寸触屏显示器,呈现更多信息。
Equipped with 17 inch touch screen, getting more information during the working process.
主要参数Main Parameters:
主轴功率 (Spindle Power) |
1.5/1.8/2.4kw可选 (Optional for 1.5/1.8/2.4kw) |
X轴最大返程速度 (X Axis Maximum Speed) |
800mm/s |
X轴直线度 (X Axis Straightness) |
±0.001mm/250mm |
Y轴重复步进精度 (Y Axis Repeat Stepping Precision) |
0.001以内/5mm |
Z轴重复精度 (Z Axis Repeating Precision) |
0.001mm |
θ轴重复定位精度 (θ Axis Repeat Positioning Accuracy) |
0.001deg |
θ轴定位精度(θ Axis Repeating Accuracy) |
0.002deg |
视觉系统(Vision System) |
高倍/低倍/双倍显微镜可选 (Optional for high power/low power/double microscope) |
主要功能(Main Functions) |
自动对准,自动对焦,寻边识别,刀痕识别,崩边检测,NCS、BBD、漏液检测 (Auto Alignment, Auto Focus, Edge Recognition, Cutting line Recognition, Chipping Detection, Non-Contact Setup, Blade Break Detection, Weeping Detection) |
实例效果Sample Effect: